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Author: | Honkanen, Jenni |
Title: | Buried ion implanted layer in bonded silicon-on-insulator wafers |
Haudattu ioni-istutettu kerros bondatuissa SOI (silicon-on-insulator) kiekoissa | |
Publication type: | Master's thesis |
Publication year: | 2011 |
Pages: | viii + 91 Language: eng |
Department/School: | Materiaalitekniikan laitos |
Main subject: | Materiaalitiede (MT-45) |
Supervisor: | Hannula, Simo-Pekka |
Instructor: | Haimi, Eero ; Mäkinen, Jari |
Digitized copy: | https://aaltodoc.aalto.fi/handle/123456789/99769 |
OEVS: | Digitized archive copy is available in Aaltodoc
|
Location: | P1 Ark Aalto 1870 | Archive |
Keywords: | ion implantation bonding silicon-on-insulator ioni-istutus bondaus SOI kiekot |
ED: | 2012-08-24 |
INSSI record number: 45113
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