search query: @keyword diffusion length / total: 4
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Author: | Haarahiltunen, Antti |
Title: | Sisäisen getteroinnin karakterisointi piissä elektronisuihkun indusoiman virran avulla |
Characterization of internal gettering in silicon by Electron Beam Induced Current | |
Publication type: | Master's thesis |
Publication year: | 2002 |
Pages: | ix + 56 Language: fin |
Department/School: | Sähkö- ja tietoliikennetekniikan osasto |
Main subject: | Elektronifysiikka (S-69) |
Supervisor: | Sinkkonen, Juha |
Instructor: | Väinölä, Hele |
OEVS: | Electronic archive copy is available via Aalto Thesis Database.
Instructions Reading digital theses in the closed network of the Aalto University Harald Herlin Learning CentreIn the closed network of Learning Centre you can read digital and digitized theses not available in the open network. The Learning Centre contact details and opening hours: https://learningcentre.aalto.fi/en/harald-herlin-learning-centre/ You can read theses on the Learning Centre customer computers, which are available on all floors.
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Location: | P1 Ark S80 | Archive |
Keywords: | gettering denuded zone (DZ) EBIC diffusion length getterointi virheetön vyöhyke EBIC diffuusiopituus |
ED: | 2002-07-08 |
INSSI record number: 18820
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