Mikro- ja nanoelektroniikka

publyear: 1997
1-1 / yhteensä 1
vuosirajaus: 1997 - poista vuosirajaus
no cover image
Microelectromechanical systems : advanced materials and fabrication methods
Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.
1997
36093
isbn:0585002509
device_type: computer thumb_size: normal
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