
cover from: Google Books
Handbook of silicon based MEMS materials and technologies
Veikko Lindroos, Teruaki Motooka, Sami Franssila, Mervi Paulasto-Krockel, Markku Tilli and Veli-Matti Airaksinen.
2010
216075
isbn:0815519885|isbn:9780815519881|isbn:1282541145|isbn:9781282541146|isbn:0080947727|isbn:9780080947723