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| Author: | Chen, H. |
| Title: | Empirical evaluation of queuing network model for semiconductor wafer fabrication. |
| Journal: | Operations Research
1988 : MAR-APR, VOL. 36:2, p. 202-215 |
| Index terms: | SEMICONDUCTOR INDUSTRY QUEUING THEORY NETWORKS |
| Language: | eng |
| Abstract: | Rough-cut performance modelling of semiconductor manufacturing operations is concerned. Integrated circuit manufacturing is briefly and highly selectively described, and congestion problems that plague wafer fabrication facilities are considered in general terms. It is shown that the congestion levels actually encountered in one wafer fabrication facility are consistent with the values predicted by a simple queueing network used to predict key performance measures. This result suggests that queueing network models can provide valuable quantitative guidance for engineers and managers of wafer fabrication facilities who wish to account for cycle time performance in their system design. |
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