search query: @author Friedman, D. J. / total: 3
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| Author: | Albin, S. L. Friedman, D. J. |
| Title: | The impact of clustered defect distributions in IC fabrication. |
| Journal: | Management Science
1989 : SEP, VOL. 35:9, p. 1066-1078 |
| Index terms: | QUALITY CONTROL PROBABILITY ELECTRONICS INDUSTRY |
| Language: | eng |
| Abstract: | Whenever defect data is encountered in industrial control applications, the Poisson distribution is generally assumed to be the underlying distribution. It has been widely reported that the defect distributions in integrated circuit fabrication exhibit clustering behaviour, a condition which invalidates the Poisson distribution assumption. An alternative model for defect data exhibiting clustering is applied and the impact of the proposed model is demonstrated. |
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