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| Author: | Castillo, E. del Hurwitz, A. M. |
| Title: | Run to Run process control: literature review and extensions |
| Journal: | Journal of Quality Technology
1997 : APR, VOL. 29:2, p. 184-196 |
| Index terms: | |
| Freeterms: | STATISTISCHE QUALITÄTSKONTROLLE |
| Language: | eng |
| Abstract: | In the last few years, Run to Run (R2R) control techniques have been developed and used to control various semiconductor manufacturing processes. These techniques combine response surface, statistical process control and feedback control techniques. This paper provides a literature review of R2R control methods from a statistical and control engineering point of view. |
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