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search query: @keyword atomic layer deposition / total: 21

references: 11-20 / 21

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	title	year	author
11.	Effects of atomic layer deposited aluminum oxide coating on lithium iron phosphate	2012	Nisula, Mikko
12.	Optimization of ТЮ2 Thin Film Growth at Different Temperatures by Atomic Layer Deposition	2011	Su, Jie
13.	Atomic Layer Deposition of Metal Thin Films	2010	Kannisto, Klaara
14.	Termosähköisten kalsiumkobolttioksidikalvojen kasvatus	2010	Viitanen, Timo
15.	Sub-wavelength coatings on metals by ALD	2009	Hashmi, Syed Ghufran
16.	ALD-reaktorin vakuumikammion suunnittelu	2009	Poutiainen, Juho
17.	Applications of photonic crystal fibers with coated or liquid crystal filled inclusions	2009	Hoffrén, Hannu
18.	Optimization of precursor pulsing in atomic layer deposition	2008	Li, Shuo
19.	Investigation of Conductive ZnO/Al2O3 Nanolaminates grown by Atomic Layer Deposition	2007	Xu, Tingmo
20.	Vacuum line chemistry in selected atomic layer deposition processes	2005	Malm, Jari

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