search query: @keyword atomic layer deposition / total: 21
references: 17-21 / 21
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title | year | author | ||
17. | 2009 | Hoffrén, Hannu |
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18. | 2008 | Li, Shuo |
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19. | 2007 | Xu, Tingmo |
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20. | 2005 | Malm, Jari |
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21. | 2002 | Lang, Teemu |
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