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search query: @keyword silicon / total: 34

references: 6-15 / 34

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	title	year	author
6.	Thermal Annealing of AlN Thin Films Fabricated by Plasma-Enhanced Atomic Layer Deposition for GaN Epitaxy	2010	Riuttanen, Lauri
7.	Coupled electron-hole transport phenomena in double-gate silicon	2010	Laakso, Sampo
8.	Iron gettering with aluminium and back-surface passivation of chrystalline silicon solar cells	2010	Lindroos, Jeanette
9.	Fixed Abrasive Chemical Mechanical Planarization Process Development for MEMS-Applications	2009	Lyytinen, Jussi
10.	Temperature dependence of the short circuit current in a silicon solar cell	2009	Numminen, Sini
11.	Transient Current Technique (TCT) Characterization of Silicon Particle Detectors	2009	Maksimow, Maria
12.	Temperature measurements in micrometre scale	2008	Shpak, Maksim
13.	Characterization of Silicon Micro-Optical Waveguides	2008	Khanna, Amit
14.	Phosphorous diffusion gettering of iron in crystalline silicon solar cells	2008	Asghar, Muhammad Imran
15.	Characterisation of piezoelectrically actuated micromechanical resonators	2008	Rosenberg, Piia

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