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search query: @instructor Franssila, Sami / total: 42

references: 33-42 / 42

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	title	year	author
33.	Processing of Inorganic-Organic Hybrid Material for Microfluidic Applications	2006	Aura, Susanna
34.	Deep Reactive Ion Etching for Microfluidic Structures	2006	Sainiemi, Lauri
35.	Glass microprocessing for fluidic devices	2006	Saarela, Ville
36.	Fabrication of thermally insulated micromechanical structures	2004	Piirainen, Tommi
37.	Optical actuation of a micromechanical oscillator	2004	Hahtela, Ossi
38.	SU-8 Photoresist as a Material for Microfludics with Integrated Electrodes	2004	Ristolainen, Tero
39.	Mikromekaaninen ionilähde piitä ja lasia prosessoimalla	2003	Marttila, Seppo
40.	Microstructures from SU-8 epoxy-photoresist for micromechanics and microfluidies	2003	Tuomikoski, Santeri
41.	Liquid phase deposition of silicon dioxide thin films	2002	Niskanen, Antti J.
42.	Molybdeenin plasmaetsausprosessin karakterisointi submikronitekniikassa	1997	Pirilä, Nina

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