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search query: @instructor Malm, Jari / total: 4

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	title	year	author
1.	Atomic Layer Deposition of Metal Thin Films	2010	Kannisto, Klaara
2.	Deposition of inorganic-organic hybrid thin films by ALD and MLD	2010	Sundberg, Pia
3.	Molekyylikerroskasvatus	2009	Halonen, Simo
4.	Atomic layer deposition of ZnO thin films on functional surfaces	2007	Sahramo, Elina

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