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search query: @keyword CMP / total: 6

references: 1-6 / 6

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	title	year	author
1.	Piikiekkojen kiilamaisuuden minimointi kiillotuksessa	2015	Naukkarinen, Toni
2.	Fixed Abrasive Chemical Mechanical Planarization Process Development for MEMS-Applications	2009	Lyytinen, Jussi
3.	Fixed Abrasive Chemical Mechanical Planarization Process Development for MEMS-Applications	2009	Lyytinen, Jussi
4.	Chemical-Mechanical Polishing of Epitaxially Grown Polysilicon for Micro-Mechanical Structures	2004	Luoto, Hannu
5.	Chemical-Mechanical Polishing of Epitaxially Grown Polysilicon for Micro-Mechanical Structures	2004	Luoto, Hannu
6.	Olioiden tallentaminen Java-palvelinsovelluksissa	2003	Tuomaala, Antti

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