search query: @keyword Electron Beam Lithography / total: 6
references: 1-6 / 6
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title | year | author | ||
1. | 2011 | Doan, Nguyet |
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2. | 2006 | Sihvonen, Olli |
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3. | 2002 | Toivola, Tero |
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4. | 2000 | Routama, Paula |
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5. | 2000 | Kainu, Kalle |
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6. | 1999 | Xia, Chuan |
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