search query: @keyword Reactive Ion Etching / total: 4
references: 1-4 / 4
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title | year | author | ||
1. | 2003 | Tuovinen, Charlotta |
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2. | 2002 | Toivola, Tero |
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3. | 2002 | Toivola, Tero |
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4. | 1999 | Xia, Chuan |
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