search query: @keyword deep reactive ion etching / total: 3
references: 1-3 / 3
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| title | year | author | ||
| 1. | 2014 | Hirvonen, Saara |
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| 2. | 2010 | Shah, Syed Ali Raza |
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| 3. | 2006 | Sainiemi, Lauri |
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