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search query: @keyword fixed abrasive / total: 3

references: 1-3 / 3

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	title	year	author
1.	Fixed Abrasive Chemical Mechanical Planarization Process Development for MEMS-Applications	2009	Lyytinen, Jussi
2.	Chemical-Mechanical Polishing of Epitaxially Grown Polysilicon for Micro-Mechanical Structures	2004	Luoto, Hannu
3.	Chemical-Mechanical Polishing of Epitaxially Grown Polysilicon for Micro-Mechanical Structures	2004	Luoto, Hannu

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