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search query: @keyword sputtering / total: 4

references: 1-4 / 4

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	title	year	author
1.	Simulations of fusion reactor relevant ion-surface interactions with Molecular Dynamics and Binary Collision Approximation	2015	Sillanpää, Heikki
2.	Characterization of thin film resistor sputtered with two different chromium silicide targets	2002	Koivisto, Outi
3.	Tantaaliyhdisteisiin perustuvat ohutkalvovastukset ja diffuusiovallit	2001	Riekkinen, Tommi
4.	Thermal Stability of the Cu/Cr/Si Structure	1998	Yoseef, Ezer

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