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Author: | Nybergh, Kjell |
Title: | Development of a PECVD Grown Passivating and Antireflecting Silicon Nitride Coating for Crystalline Silicon Solar Cells |
Utveckling av en passiverande och antireflekterande kiselnitridfilm odlad med PECVD på kristallina kiselsolceller | |
PECVD:ssä kasvatetun passivoivan ja heijastusta estävän piinitridikalvon kehittäminen kidepiiaurinkokennoja varten | |
Publication type: | Licentiate thesis |
Publication year: | 1999 |
Pages: | 126 Language: eng |
Department/School: | Sähkö- ja tietoliikennetekniikan osasto |
Main subject: | Elektronifysiikka (S-69) |
Supervisor: | Sinkkonen, Juha |
Instructor: | |
OEVS: | Electronic archive copy is available via Aalto Thesis Database.
Instructions Reading digital theses in the closed network of the Aalto University Harald Herlin Learning CentreIn the closed network of Learning Centre you can read digital and digitized theses not available in the open network. The Learning Centre contact details and opening hours: https://learningcentre.aalto.fi/en/harald-herlin-learning-centre/ You can read theses on the Learning Centre customer computers, which are available on all floors.
Logging on to the customer computers
Opening a thesis
Reading the thesis
Printing the thesis
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Location: | P1 Ark S80 | Archive |
Keywords: | antireflecting coating ARC passivating PECVD Plasma Enhanced Chemical Vapor Deposi` silicon nitride SiN antireflekterande filma ARC kiselnitrid passiverande PECVD |
ED: | 1999-07-21 |
INSSI record number: 14691
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