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| Author: | Xia, Chuan |
| Title: | Electron Beam Lithography |
| Elektronisuihkulitografia | |
| Publication type: | Licentiate thesis |
| Publication year: | 1999 |
| Pages: | 73 Language: eng |
| Department/School: | Sähkö- ja tietoliikennetekniikan osasto |
| Main subject: | Elektronifysiikka (S-69) |
| Supervisor: | Sinkkonen, Juha |
| Instructor: | |
| Location: | S | Archive |
| Keywords: | scanning electron microscope electron beam lithography liftoff reactive ion etching anisotropic etching fluorine gases silicon nanostructures |
| ED: | 1999-09-17 |
INSSI record number: 14692
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