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Author: | Junttila, Virpi |
Title: | FEM-Modelling of gas-structure interaction in MEMS |
Kaasu-rakenne vuorovaikutteen FEM-mallitus MEM-systeemeissä | |
Publication type: | Licentiate thesis |
Publication year: | 2003 |
Pages: | 102 Language: eng |
Department/School: | Sähkö- ja tietoliikennetekniikan osasto |
Main subject: | Laskennallinen tekniikka (S-114) |
Supervisor: | Kaski, Kimmo |
Instructor: | Hietanen, Jarmo |
OEVS: | Electronic archive copy is available via Aalto Thesis Database.
Instructions Reading digital theses in the closed network of the Aalto University Harald Herlin Learning CentreIn the closed network of Learning Centre you can read digital and digitized theses not available in the open network. The Learning Centre contact details and opening hours: https://learningcentre.aalto.fi/en/harald-herlin-learning-centre/ You can read theses on the Learning Centre customer computers, which are available on all floors.
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Location: | P1 Ark S80 | Archive |
Keywords: | MEMS FEM gas-structure interactions harmonic vibration damping perforation MEMS FEM kaasu-rakenne vuorovaikutus harmoninen värähtely vaimennus rei'itetyt kalvot |
ED: | 2004-02-05 |
INSSI record number: 21159
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