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Author:Tikka, Pasi
Title:Thin film bulk acoustic wave resonators and filters and their optical imaging
Ohutkalvotilavuusaaltoresonaattorit ja -suodattimet sekä niiden optinen kuvantaminen
Publication type:Master's thesis
Publication year:2010
Pages:104      Language:   eng
Department/School:Informaatio- ja luonnontieteiden tiedekunta
Main subject:Optiikka ja molekyylimateriaalit   (Tfy-125)
Supervisor:Kaivola, Matti
Instructor:Kokkonen, Kimmo
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Location:P1 Ark Aalto  123   | Archive
Keywords:bulk acoustic waves
optical imaging
laser interferometer
akustiset tilavuusaallot
radiotaajuussuodattimet
optinen kuvantaminen
laserinterferometria
Abstract (eng): In this work, basics and working principle of BAW/FBAR resonators and filters has been presented with their practical applications.
FBAR filters can provide benefits compared to microwave ceramics filters or SAW filters.

In this Master's Thesis, apparatus for probing Bulk Acoustic Wave resonators and filters has been constructed to Infineon Technologies facilities and the construction and results presented.
Interferometer is able to measure amplitude and phase simultaneously over the frequency range.
With one sample, also absolute amplitude has been measured and correct magnitude to theoretical value has been found.
Several ZnO based resonator samples has been measured and results has been presented in this Thesis as well described in two scientific publications.

Applying laser interferometer to study wave propagation and dispersion relation in the FBAR/BAW devices has been novel for the industry.
These two publications have been iniating a lot of research on the dispersion relations and how to optimise resonator structures for optimum performance.
Moreover these papers have been referred tens of times in the scientific literature.

In the last part, latest application and RF architecture has been presented where BAW/FBAR technology has been utilized.
These results have been implemented in the latest mobile phones, like Nokia X6 and N8.
Moreover, these studies have been presented in two workshops, in the IEEE ISSCC2009 and IMS20I0.
Abstract (fin): Diplomityössä on esitetty akustisiin tilavuusaaltoihin perustuvia resonaattoreita ja suodattimia radiotaajuuksille sekä niiden tutkimista laserinterferometrillä.
Tässä työssä on rakennettu laserinterferometri akustisten tilavuusaaltoresonaattorien kuvantamiseen.
Interferometri rakennettiin Infineon Technologiesin tiloissa Muenchenissä vuoden 1999 aikana.
Laitteen rakenne ja mittaustulokset on esitetty tässä työssä.
Rakennettu laite pystyy mittaamaan sekä aallon amplitudin että vaiheen jopa 2 GHz taajuudella ja pystyy erottamaan nanometriskaalan värähtelyamplitudit absoluuttisesti.

Työssä on toteutettu myös laskentaohjelma tulosten esittämiseen nk. dispersiodiagrammissa.
Dispersiodiagrammi avaa uuden tavan tarkastella akustisten tilavuusaaltoresonaattoreiden ominaisuuksia sekä määritellä materiaaliparametreja käytetyille ohutkalvoille.
Laitteisto on esitetty kahdessa tieteellisessä julkaisussa.
Näitä julkaisuja on käytetty viitteenä kymmenissä muissa tieteellisissä julkaisuissa.

Työn viimeisessä osassa esitellään näiden komponenttien käyttömahdollisuudet.
FBAR komponentit ovat vaikuttaneet suuresti matkapuhelinten radiotaajuusosien arkkitehtuuriin.
Osassa esitetään viimeisimmät sovellukset FBAR suodattimille ja dupleksereille.
Radiotaajuusosien arkkitehtuurit on esitetty myös kahdessa tieteellisessä konferenssissa IEEE:n ISSCC2009:ssa ja IMS2010:ssa.
ED:2010-11-19
INSSI record number: 41335
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