search query: @keyword bonding / total: 11
reference: 3 / 11
| Author: | Honkanen, Jenni |
| Title: | Buried ion implanted layer in bonded silicon-on-insulator wafers |
| Haudattu ioni-istutettu kerros bondatuissa SOI (silicon-on-insulator) kiekoissa | |
| Publication type: | Master's thesis |
| Publication year: | 2011 |
| Pages: | viii + 91 Language: eng |
| Department/School: | Materiaalitekniikan laitos |
| Main subject: | Materiaalitiede (MT-45) |
| Supervisor: | Hannula, Simo-Pekka |
| Instructor: | Haimi, Eero ; Mäkinen, Jari |
| Digitized copy: | https://aaltodoc.aalto.fi/handle/123456789/99769 |
| OEVS: | Digitized archive copy is available in Aaltodoc
|
| Location: | P1 Ark Aalto 1870 | Archive |
| Keywords: | ion implantation bonding silicon-on-insulator ioni-istutus bondaus SOI kiekot |
| ED: | 2012-08-24 |
INSSI record number: 45113
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