search query: @supervisor Sinkkonen, Juha / total: 110
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Author: | Xia, Chuan |
Title: | Electron Beam Lithography |
Elektronisuihkulitografia | |
Publication type: | Licentiate thesis |
Publication year: | 1999 |
Pages: | 73 Language: eng |
Department/School: | Sähkö- ja tietoliikennetekniikan osasto |
Main subject: | Elektronifysiikka (S-69) |
Supervisor: | Sinkkonen, Juha |
Instructor: | |
Location: | S | Archive |
Keywords: | scanning electron microscope electron beam lithography liftoff reactive ion etching anisotropic etching fluorine gases silicon nanostructures |
ED: | 1999-09-17 |
INSSI record number: 14692
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