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Author:Sintonen, Sakari
Title:Superhilarakenteiden karakterisointi röntgendiffraktio- ja röntgenheijastusmenetelmillä
Characterization of Superlattice Structures by X-Ray Diffraction and X-Ray Reflectivity Measurements
Publication type:Master's thesis
Publication year:2009
Pages:8 + 62      Language:   fin
Department/School:Elektroniikan, tietoliikenteen ja automaation tiedekunta
Main subject:Optoelektroniikka   (S-104)
Supervisor:Lipsanen, Harri
Instructor:Suihkonen, Sami
Electronic version URL: http://urn.fi/URN:NBN:fi:aalto-201203071318
OEVS:
Electronic archive copy is available via Aalto Thesis Database.
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Location:P1 Ark S80     | Archive
Keywords:X-ray diffraction
X-ray reflectivity
superlattice
XRR
XRD
röntgendiffraktio
röntgenheijastus
superhila
Abstract (eng): This thesis presents a method for characterization of superlatticestructures.
The characterization of superlatticestructures involves determining the lattice constants, thicknesses and compositions of the individual layers of the superlattice, as well as measuring the state of strain present in the superlatticestructure.

The method presented in this work combines both X-ray reflectivity (XRR) and X-ray diffraction (XRD) measurements.
XRR measurements enable the determination of small, nanometre-scale layers.
The method is based on determining the individual thicknesses by XRR measurements, after which it is possible to determine the remaining unknown parameters by XRD measurements.

To illustrate the use of the method, it was applied to samples whose thicknesses and compositions were also determined by simulating XRD measurements.
The results of the method and the simulations were in excellent agreement with each other.
The method is suitable for characterization of all superlattice structures excluding structures with weak periodicity and those with rough interfaces.

Superlattices can be characterized solely by simulation of diffraction curves.
Unfortunately, the results obtained by simulation are not unique.
The benefit of the method presented in this thesis is that the results are unique.
Therefore the usage of simulation may be restricted to verifying experimental results.
Abstract (fin): Tässä diplomityössä esiteltiin menetelmä superhilarakenteiden karakterisoimiseksi.
Superhilarakenteiden karakterisointi kattaa sen eri osien hilavakioiden, paksuuksien ja moniyhdisteiden kompositioiden määrittämisen.
Lisäksi on selvitettävä rakenteen jännitystilat.

Superhilojen karakterisointi suoritettiin röntgenheijastus- ja röntgendiffraktiomittausten avulla.
Röntgenheijastusmittaukset mahdollistavat nanometrin luokkaa olevien paksuuksien mittaamisen.
Tässä työssä esitellyssä menetelmässä superhilarakenteiden kerrosten paksuudet mitattiin röntgenheijastusmittausten avulla, jonka jälkeen loput tuntemattomista parametreista määritettiin röntgendiffraktiomittausten perusteella.

Menetelmää sovellettiin näytteisiin joiden kompositiot ja paksuudet määritettiin myös röntgendiffraktiomittauksia simuloimalla.
Menetelmän antamat tulokset vastasivat simuloituja tuloksia erittäin hyvin.
Menetelmä soveltuu kaikkien superhilarakenteiden karakterisointiin, lukuun ottamatta rakenteita joiden pinnat ovat liian karheita ja/tai aaltoilevia sekä rakenteita joiden periodisuus on heikko.

Superhila voidaan myös karakterisoida simuloimalla röntgendiffraktiota.
Simuloinnista saatavien tuloksien ongelmana on, että ne eivät ole yksikäsitteisiä.
Työssä esitellyn menetelmän etuna on, että tulokset ovat yksikäsitteisiä, jolloin simulointia voidaan hyödyntää pelkästään tulosten oikeellisuuden tarkistamiseen.
ED:2009-10-07
INSSI record number: 38442
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