search query: @keyword CVD / total: 15
reference: 14 / 15
Author: | Janhunen, Marko |
Title: | Epitaktisten piikerrosten karakterisointimenetelmät ja arviointi elinaikamittauksin |
Characterization Methods for Epitaxial Silicon Layers and Evaluation of Layers by Lifetime measurements | |
Publication type: | Master's thesis |
Publication year: | 1997 |
Pages: | 77 Language: fin |
Department/School: | Sähkö- ja tietoliikennetekniikan osasto |
Main subject: | Elektronifysiikka (S-69) |
Supervisor: | Kuivalainen, Pekka |
Instructor: | Ahopelto, Jouni |
OEVS: | Electronic archive copy is available via Aalto Thesis Database.
Instructions Reading digital theses in the closed network of the Aalto University Harald Herlin Learning CentreIn the closed network of Learning Centre you can read digital and digitized theses not available in the open network. The Learning Centre contact details and opening hours: https://learningcentre.aalto.fi/en/harald-herlin-learning-centre/ You can read theses on the Learning Centre customer computers, which are available on all floors.
Logging on to the customer computers
Opening a thesis
Reading the thesis
Printing the thesis
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Location: | P1 Ark S80 | Archive |
Keywords: | CVD lifetime recombination resisitivity layer thickness DLTS crystal defect CVD elinaika rekombinaatio resistiivisyys kerrospaksuus DLTS kidevirhe |
ED: | 1997-03-17 |
INSSI record number: 11984
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