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Author:Aura, Susanna
Title:Processing of Inorganic-Organic Hybrid Material for Microfluidic Applications
Epäorgaaninen-orgaanisen hyhridimateriaalin prosessointi mikrofluidistisiin sovelluksiin
Publication type:Master's thesis
Publication year:2006
Pages:59      Language:   eng
Department/School:Sähkö- ja tietoliikennetekniikan osasto
Main subject:Elektroniikan valmistustekniikka   (S-113)
Supervisor:Kivilahti, Jorma
Instructor:Franssila, Sami
Electronic version URL: http://urn.fi/urn:nbn:fi:tkk-007322
OEVS:
Electronic archive copy is available via Aalto Thesis Database.
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Location:P1 Ark S80     | Archive
Keywords:ORMOCER
microfluidic
ORMOCER
mikrofluidistiikka
Abstract (eng):Microsystem technology and as a part of it microfluidic is a fast growing field of technology, which produces e.g microscale analysis devices for analytical chemistry.
Traditionally silicon and glass have been used for microfluidic device fabrication, but polymers are gaining ground mainly due to their easy processing.

In this master's thesis a new inorganic-organic hybrid polymer.
ORMOCER®, is presented and its properties are evaluated from microfluidic point of view.
Commercially available ORMOCER® material called ORMOCOMP® has been used throughout this thesis.
Both UV-lithography and UV-embossing were tested to produce structures.
The tests showed that, ORMOCOMP is extremely UV-sensitive and for this reason fabrication of small. 100 µm structures is difficult.
However, smaller structures can he produced by using a filter to reduce the intensity of the maskaligner.
If the structure size is under 20 µm, the UV-embossing should be used since in this method the exposure dose is less critical.

The bonding process for enclosed channel fabrication has been developed.
This techniques provides an easy and reproducible bonding.
Chemical stability and cell adhesion of ORMOCOMP® were also studied.
The chemical stability of ORMOCOMP proved to be relatively good, and it showed non-toxity in cell adhesion tests.
Abstract (fin):Mikrosysteemitekniikan yhtenä osa-alueena mikrofluidistiikka on nopeasti kehittyvä teknologia, joka tuottaa mm. erilaisia mikrokokoluokan analyysilaitteita analyyttisen kemian tarkoituksiin.
Perinteisiä materiaaleja mikrofluistiikassa ovat olleet pii ja lasi, mutta erilaiset polymeerimateriaalit ovat valtaamassa alaa lähinnä niiden prosessoinnin helppouden vuoksi.

Tämä diplomityö esittelee uuden epäorgaanisen-orgaanisen hybridi polymeerin, ORMOCER®in ja tarkastelee sen ominaisuuksia mikrofluidististen sovellusten kannalta.
Kaupallisesti saatavilla olevaa ORMOCER materiaalia, ORMOCOMPia, on käytetty tähän diplomityöhön tehdyissä tutkimuksissa.
Sekä UV-litografiaa että UV-embossingia on käytetty rakenteiden valmistamiseen.
Tehdyt testit osoittivat että ORMOCOMP on UV herkkä materiaali ja tästä syystä pienten, alle 100 µm rakenteiden valmistus on hankalaa.
Pienempien rakenteiden tuottaminen on kuitenkn mahdollista käyttäen suodatinta valotuslaitteen intensiteetin vähentämiseksi.
Mikäli halutaan valmistaa alle 20 µm rakenteita, on syytä käyttää UV-embossingia, koska säteilyannos on tässä menetelmässä vähemmän kriittinen.

Kanavien sulkemiseksi on kehitetty bondausmenetelmä, joka tarjoaa helpon ja toistettavan bondauksen.
ORMOCOMP®in kemiallista stabiilisuutta ja soluadheesiota siihen on myös tutkittu.
ORMOCOMP® osoittautui kemiallisesti kohtalaisen stabiiliksi ja lisäksi se todistettiin myrkyttömäksi soluadheesiotesteissä.
ED:2006-09-12
INSSI record number: 32762
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