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Author:Haikola, Juha Tapani
Title:Wear-resistant embedded thermal sensor
Kulutusta kestävä integroitu lämpötilasensori
Publication type:Master's thesis
Publication year:2012
Pages:[6] + 55      Language:   eng
Department/School:Mikro- ja nanotekniikan laitos
Main subject:Optiikka ja molekyylimateriaalit   (S-129)
Supervisor:Tittonen, Ilkka
Instructor:Tervakangas, Sanna
Electronic version URL: http://urn.fi/URN:NBN:fi:aalto-201209213150
OEVS:
Electronic archive copy is available via Aalto Thesis Database.
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Location:P1 Ark Aalto  722   | Archive
Keywords:thermistor
Amorphous carbon
resistance
temperature
piezoresistivity
hopping conductivity
thin film
embedded structure
sensor
termistori
amorfinen hiili
resistanssi
lämpötila
pietsoresistiivisyys
ohut kalvo
integroitu rakenne
sensori
Abstract (eng): The work reported in this thesis has been carried out as a part of Intelligent and customised tooling (IC2) EU project, aimed at developing embedded sensors onto surface of industrial tools.
To this end, the amorphous carbon thin films fabricated primarily on alumina and insulated steel substrates using DIARC FCAD method are inspected for thermistor properties.
In order to embed this sensor on an industrial tool, the possible disturbances from industrial environment were examined along with other parts of the device.

As a result, the thermistor behaviour following the hopping conductivity mechanism has been observed between room temperature and 250 °C on both substrates.
In addition, the material was found to possess a piezoresistive behaviour, although, this behaviour was small compared to the overall temperature sensitivity.
Abstract (fin): Diplomityö on tehty osana Intelligent and customised tooling (IC2) EU-hanketta, jonka tarkoituksena on integroitujen sensoreiden valmistaminen upotettuina teollisten koneen osien pintoihin.
Tässä työssä tutkittiin amorfisesta hiilestä DIARC FCAD-menetelmällä valmistettuja ohutkalvoja termistoriominaisuuksien määrittämiseksi alumiinioksidi- ja eristetyillä terässubstraateilla.
Myös materiaalin mahdollisia pietsoresistiivisiä ominaisuuksia tutkittiin teollisen ympäristön aiheuttamien häiriöiden varalta.

Termistorin havaittiin seuraavan hopping conductivity- mallia huoneenlämmön ja 250 °C välillä molemmilla alusmateriaaleilla.
Lisäksi materiaalin todettiin käyttäytyvän pietsoresistiivisten materiaalien tavoin.
Termistorin lämpötilaherkkyyden todettiin tosin olevan huomattavasti merkittävämpi rakenteen resistanssiin vaikuttava tekijä.
ED:2012-06-19
INSSI record number: 44682
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