search query: @supervisor Lindroos, Veikko / total: 156
reference: 8 / 156
Author: | Koivisto, Outi |
Title: | Characterization of thin film resistor sputtered with two different chromium silicide targets |
Kahdella eri kromisilisiditargetilla sputteroitujen ohutkalvovastusten karakterisointi | |
Publication type: | Master's thesis |
Publication year: | 2002 |
Pages: | 61 Language: eng |
Department/School: | Materiaali- ja kalliotekniikan osasto |
Main subject: | Metalli- ja materiaalioppi (Mak-45) |
Supervisor: | Lindroos, Veikko |
Instructor: | Virolainen, Ulla ; Haimi, Eero |
OEVS: | Electronic archive copy is available via Aalto Thesis Database.
Instructions Reading digital theses in the closed network of the Aalto University Harald Herlin Learning CentreIn the closed network of Learning Centre you can read digital and digitized theses not available in the open network. The Learning Centre contact details and opening hours: https://learningcentre.aalto.fi/en/harald-herlin-learning-centre/ You can read theses on the Learning Centre customer computers, which are available on all floors.
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Location: | P1 Ark V80 | Archive |
Keywords: | chromium silicide sputtering thin film resistor kromisilisidi sputterointi ohutkalvovastus |
ED: | 2002-07-12 |
INSSI record number: 18854
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