search query: @keyword resonaattori / total: 18
reference: 12 / 18
| Author: | Koskenvuori, Mika |
| Title: | Mekaanisen resonaattorin toteuttaminen MHz-alueelle SOI-teknologialla |
| Realization of a mechanical resonator in the MHz-range using SOI-technology | |
| Publication type: | Master's thesis |
| Publication year: | 2002 |
| Pages: | 73 Language: fin |
| Department/School: | Sähkö- ja tietoliikennetekniikan osasto |
| Main subject: | Mittaustekniikka (S-108) |
| Supervisor: | Tittonen, Ilkka |
| Instructor: | Mattila, Tomi ; Oja, Aarne |
| Digitized copy: | https://aaltodoc.aalto.fi/handle/123456789/89612 |
| OEVS: | Digitized archive copy is available in Aaltodoc
|
| Location: | P1 Ark S80 | Archive |
| Keywords: | micromechanics resonator SOI bias-voltage RF-MEMS mikromekaniikka resonaattori SOI bias-jännite RF-MEMS |
| ED: | 2002-03-20 |
INSSI record number: 18386
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