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Author: | Koikkalainen, Seija |
Title: | Urasahattujen piikiekkojen lasitusprosessi mikromekaanisten antureiden valmistuksessa |
Glassing process of groove sawed silicon wafers in micromechanical sensor manufacturing | |
Publication type: | Master's thesis |
Publication year: | 2001 |
Pages: | ix + 101 s. + liitt. 9 Language: fin |
Department/School: | Materiaali- ja kalliotekniikan osasto |
Main subject: | Elektroniikan valmistustekniikka (S-113) |
Supervisor: | Kivilahti, Jorma |
Instructor: | Mutikainen, Risto |
OEVS: | Electronic archive copy is available via Aalto Thesis Database.
Instructions Reading digital theses in the closed network of the Aalto University Harald Herlin Learning CentreIn the closed network of Learning Centre you can read digital and digitized theses not available in the open network. The Learning Centre contact details and opening hours: https://learningcentre.aalto.fi/en/harald-herlin-learning-centre/ You can read theses on the Learning Centre customer computers, which are available on all floors.
Logging on to the customer computers
Opening a thesis
Reading the thesis
Printing the thesis
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Location: | P1 Ark V80 | Archive |
Keywords: | micromechanical glass vertical glass insulation layer viscosity viscous flow melting silicon-glass seals Sol-Gel mikromekaaninen lasi pystysuora lasieriste viskositeetti viskoosi virtaus sulatus pii-lasi-liitos |
ED: | 2002-07-16 |
INSSI record number: 18876
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