search query: @keyword atomic layer deposition / total: 21
reference: 3 / 21
| Author: | Isakov, Kirill |
| Title: | New nanoporous anti-reflective coating by water treatment of ALD deposited Al2O3 |
| Publication type: | Master's thesis |
| Publication year: | 2016 |
| Pages: | v + 43 s. + liitt. 1 Language: eng |
| Department/School: | Sähkötekniikan korkeakoulu |
| Main subject: | Micro and Nanotechnology (S3010) |
| Supervisor: | Sopanen, Markku |
| Instructor: | Kauppinen, Christoffer |
| Electronic version URL: | http://urn.fi/URN:NBN:fi:aalto-201606172484 |
| Location: | P1 Ark Aalto 4299 | Archive |
| Keywords: | anti-reflective coating nanoporous materials atomic layer deposition alumina |
| Abstract (eng): | In this work a process for fabricating nanoporous alumina anti-reflective coatings was developed. Anti-reflective coatings were designed for air-glass interface and soda-lime glass was used in the experiments. Alumina was deposited on glass by atomic layer deposition, and then transformed into nanoporous state by immersion in heated de-ionized water. The conditions for nanoporous alumina creation by de-ionized water treatment were investigated and the resulted structure was analysed with ellipsometry, scanning electron microscopy (SEM), and atomic force microscopy (AFM). The transmittance of the coated glass was measured in a Cary 7000 spectrometer, showing excellent broadband and omnidirectional performance. The average transmittance for a visible range of spectrum of a double-side coated glass is up to 99.3% versus 91.9% for a non-coated glass. The transmittance for 70 degrees incident light is 85.6% which is 13.9% higher than for pure glass. |
| ED: | 2016-07-17 |
INSSI record number: 53916
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