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Author: | Lempinen, Vesa-Pekka |
Title: | Fabrication, characterization and applications of rapid thermal processed silicon dioxide thin-films |
RTO oksidoitujen piidioksidiohutkalvojen valmistus, karakterisointi ja sovellukset | |
Publication type: | Master's thesis |
Publication year: | 1999 |
Pages: | 55 Language: eng |
Department/School: | Teknillisen fysiikan ja matematiikan osasto |
Main subject: | Elektronifysiikka (S-69) |
Supervisor: | Kuivalainen, Pekka |
Instructor: | Härkönen, Jaakko |
OEVS: | Electronic archive copy is available via Aalto Thesis Database.
Instructions Reading digital theses in the closed network of the Aalto University Harald Herlin Learning CentreIn the closed network of Learning Centre you can read digital and digitized theses not available in the open network. The Learning Centre contact details and opening hours: https://learningcentre.aalto.fi/en/harald-herlin-learning-centre/ You can read theses on the Learning Centre customer computers, which are available on all floors.
Logging on to the customer computers
Opening a thesis
Reading the thesis
Printing the thesis
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Location: | P1 Ark TF80 | Archive |
Keywords: | RTO silicon dioxide thin-film PMOS RTO piidioksidi ohutkalvo PMOS |
ED: | 2000-01-26 |
INSSI record number: 15182
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