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Author: | Putkonen, Jyrki |
Title: | Järjestelmä mikromekaanisten piianturien dimensioiden mittaamiseen optisesti |
Optical system to measure dimensions of micromechanical silicon sensors | |
Publication type: | Master's thesis |
Publication year: | 1992 |
Pages: | 45 Language: fin |
Department/School: | Sähkötekniikan osasto |
Main subject: | Mittaustekniikka (Ele-66a) |
Supervisor: | Wallin, Pekka |
Instructor: | Kuisma, Heikki |
OEVS: | Electronic archive copy is available via Aalto Thesis Database.
Instructions Reading digital theses in the closed network of the Aalto University Harald Herlin Learning CentreIn the closed network of Learning Centre you can read digital and digitized theses not available in the open network. The Learning Centre contact details and opening hours: https://learningcentre.aalto.fi/en/harald-herlin-learning-centre/ You can read theses on the Learning Centre customer computers, which are available on all floors.
Logging on to the customer computers
Opening a thesis
Reading the thesis
Printing the thesis
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Location: | P1 Ark S80 | Archive |
Keywords: | autofocus optical measuring thickness measurement depth profile autofokus optinen mittaaminen paksuusmittaus profiili |
ED: | 1994-04-29 |
INSSI record number: 7887
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