search query: @keyword ALD / total: 38
reference: 8 / 38
| Author: | Valluru, Dileep |
| Title: | Surface Passivated Black Silicon Photodetectors with Induced Junction |
| Publication type: | Master's thesis |
| Publication year: | 2015 |
| Pages: | 55 Language: eng |
| Department/School: | Sähkötekniikan korkeakoulu |
| Main subject: | Micro and Nanotechnology (S3010) |
| Supervisor: | Savin, Hele |
| Instructor: | Juntunen, Mikko ; Repo, Päivikki ; Vähänissi, Ville |
| Electronic version URL: | http://urn.fi/URN:NBN:fi:aalto-201506303463 |
| Location: | P1 Ark Aalto 3047 | Archive |
| Keywords: | black silicon photodetectors induced junction surface passivation aluminum oxide ALD |
| ED: | 2015-08-16 |
INSSI record number: 51872
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