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| Author: | Partanen, Mikko Paavali |
| Title: | Mikromekaanisen kulmanopeusanturielementin tuotannollisen testauksen kehittäminen |
| Development of productional testing for micromechanical angular rate sensor element | |
| Publication type: | Master's thesis |
| Publication year: | 2007 |
| Pages: | x + 72 s. +liitt. 6 Language: fin |
| Department/School: | Sähkö- ja tietoliikennetekniikan osasto |
| Main subject: | Optoelektroniikka (S-104) |
| Supervisor: | Lipsanen, Harri |
| Instructor: | Viljakainen, Harri |
| Digitized copy: | https://aaltodoc.aalto.fi/handle/123456789/94524 |
| OEVS: | Digitized archive copy is available in Aaltodoc
|
| Location: | P1 Ark S80 | Archive |
| Keywords: | angular rate sensor element testing machine vision test development MEMS kulmanopeusanturi elementtitestaus konenäkö testauskehitys |
| ED: | 2007-05-16 |
INSSI record number: 33970
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