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| Author: | Kettula, Paula |
| Title: | Contamination control in Aalto Nanofab cleanroom |
| Publication type: | Bachelor's thesis |
| Publication year: | 2015 |
| Pages: | 24 Language: eng |
| Department/School: | Kemian tekniikan korkeakoulu |
| Degree programme: | Materiaalitekniikan koulutusohjelma |
| Main subject: | Materiaalitekniikka (MT901) |
| Supervisor: | Laaksonen, Päivi |
| Instructor: | Franssila, Sami |
| Electronic version URL: | http://urn.fi/URN:NBN:fi:aalto-201602031221 |
| Location: | |
| Keywords: | cleanroom nanotechnology contamination control |
| ED: | 2016-02-21 |
INSSI record number: 53030
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