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Author:Auromaa, Mikko
Title:Coupled Micromechanical Resonator Structures
Kytketyt mikromekaaniset resonaattorirakenteet
Publication type:Master's thesis
Publication year:2004
Pages:62      Language:   eng
Department/School:Sähkö- ja tietoliikennetekniikan osasto
Main subject:Mittaustekniikka   (S-108)
Supervisor:Tittonen, Ilkka
Instructor:Koskenvuori, Mikko
OEVS:
Electronic archive copy is available via Aalto Thesis Database.
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Location:P1 Ark S80     | Archive
Keywords:RF-MEMS
coupled systems
micromechanics
bulk acoustic wave
RF-MEMS
kytketyt systeemit
mikromekaniikka
bulkkiakustinen aalto
Abstract (eng):Three coupled micromechanical resonator structures were measured and analyzed in this thesis. Resonators were mostly longitudinal, bulk acoustic wave (BAW) resonators. The nominal frequencies of the resonators were close to 13 MHz. Both mechanical and electromechanical coupling were used in these resonator systems.

One of the resonators was composed of two electromechanically coupled symmetric BAW resonators. For other two of the structures the coupling between different resonators was mechanical. Bridge-resonator's flexural mode was coupled to plate resonator's Lame-mode in one of these two. Another resonator uses Poisson-mode coupling, in which compression in one dimension causes extension in another dimension.

Resonator's properties were simulated with APLAC-circuit simulator program. FEM-program was used to solve resonance frequencies for one of the resonator structures.
Abstract (fin):Työssä tutkittiin kolmea kytkettyä resonaattorirakennetta. Yksittäiset resonaattorit perustuivat pääosin pitkittäissuuntaiseen bulkkiakustisen aallon (BA W) värähtelymoodiin. Resonaattorien ominaistaajuudet olivat lähellä 13 MHz:a. Resonaattorit kytkeytyivät toisiinsa sekä mekaanisesti että elektromekaanisesti.

Yksi tutkituista resonaattoreista koostui kolmesta elektromekaanisesti kytketystä symmetrisestä BA Wresonaattorista. Kahdessa resonaattorirakenteessa kytkentä resonaatorien välillä oli mekaanista. Siltaresonaattorin taipumamoodi kytkettiin levyresonaattorin Lame-moodiin toisessa näistä. Toinen taas käytti Poisson kytkentää, jossa puristus yhdessä dimensiossa aiheuttaa laajentumista toisessa dimensiossa.

Resonaattorien ominaisuuksia tutkittiin APLAC-piirisimulaatori ohjelmalla. FEM-ohjelmaa käytettiin yhden resonaattorirakenteen värähtelytaajuuksien selvittämiseen.
ED:2004-02-02
INSSI record number: 21136
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