search query: @supervisor Paulasto-Kröckel, Mervi / total: 64
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Author: | Broas, Mikael |
Title: | Embrittlement of Polysilicon Thin Films Under a Corrosive Atmosphere |
Monikiteisten piiohutkalvojen haurastuminen korrodoivassa ympäristössä | |
Publication type: | Master's thesis |
Publication year: | 2013 |
Pages: | vii + 78 s. + liitt. 12 Language: eng |
Department/School: | Sähkötekniikan korkeakoulu |
Main subject: | Elektroniikan integrointi ja luotettavuus (S-113) |
Supervisor: | Paulasto-Kröckel, Mervi |
Instructor: | Mattila, Toni |
Electronic version URL: | http://urn.fi/URN:NBN:fi:aalto-201401101088 |
OEVS: | Electronic archive copy is available via Aalto Thesis Database.
Instructions Reading digital theses in the closed network of the Aalto University Harald Herlin Learning CentreIn the closed network of Learning Centre you can read digital and digitized theses not available in the open network. The Learning Centre contact details and opening hours: https://learningcentre.aalto.fi/en/harald-herlin-learning-centre/ You can read theses on the Learning Centre customer computers, which are available on all floors.
Logging on to the customer computers
Opening a thesis
Reading the thesis
Printing the thesis
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Location: | P1 Ark Aalto 1085 | Archive |
Keywords: | polysilicon silicon nitride MEMS embrittlement thin film reliability testing nanoindentation TEM XPS monikiteinen pii piinitridi MEMS haurastuminen ohutkalvo luotettavuustestaus nanoindentaatio TEM XPS |
ED: | 2014-01-19 |
INSSI record number: 48422
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