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Author:Ristolainen, Tero
Title:SU-8 Photoresist as a Material for Microfludics with Integrated Electrodes
Publication type:Master's thesis
Publication year:2004
Pages:67      Language:   eng
Department/School:Materiaali- ja kalliotekniikan osasto
Main subject:Metalli- ja materiaalioppi   (Mak-45)
Supervisor:Lehto, Ari
Instructor:Franssila, Sami ; Tuomikoski, Santeri
OEVS:
Electronic archive copy is available via Aalto Thesis Database.
Instructions

Reading digital theses in the closed network of the Aalto University Harald Herlin Learning Centre

In the closed network of Learning Centre you can read digital and digitized theses not available in the open network.

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Location:P1 Ark V80     | Archive
Keywords:physical vapor deposition
metals
polymers
adhesion
microfluidics and isotachophoresis
fysikaalinen kaasufaasipinnoitus
metallit
polymeerit
adheesio
mikrofuidistiikka ja isotakoforeesi
Abstract (eng): The aim of this diploma thesis was to study epoxy-based resist SU-8 and metal adhesion.
Theoretical part of this thesis is divided into three parts.
In the first part, basic methods of physical vapour deposition are presented and the main properties are described.
In the second part, fabrication methods for micromachining are introduced and the properties of SU-8 resist are reviewed.
In the third part interactions between polymers and metals are reviewed and the adhesion mechanisms are discussed.

Platinum was chosen for the metal used for electrodes in the detector, therefore processing condition for platinum deposition and patterning was developed.
Adhesion tests for metals were done with tape test.
Application area of this thesis was to design and fabricate a device for isotachophoresis.
The device consists of channels made out of SU-8 and integrated platinum electrodes.
The component has all four micro channel walls covered with SU-8.
Abstract (fin): Tämän diplomityön tavoitteena on tutkia epoksipolymeeripohjaisen resistin SU-8:n ja metallien välistä adheesiota.
Työn teoriaosuus jakautuu kolmeen osa-alueeseen.
Ensimmäisessä osassa käydään läpi fysikaalisen kaasufaasipinnoituksen perusmuodot sekä perehdytään niiden ominaisuuksiin.
Kirjallisuuden toisessa osassa esitellään mikromekaniikassa käytettyjä valmistusmenetelmiä sekä SU-8 resistin ominaisuuksia.
Teorian kolmannessa osassa perehdytään polymeerin ja metallin väliseen vuorovaikutukseen sekä niiden kiinnipysyvyyteen.

Platina soveltuu mikrofluidistisiin kohteisiin, joten sen kuvioitavuus- ja resistanssi paksuuden funktiona määriteltiin.
Metallien adheesiotutkimukset suoritettiin teippitestillä.
Työn sovelluskohteena oli suunnitella ja valmistaa komponentti isotakoforeesiin.
Komponentti koostui mikrofluidistisista kanavista, jotka valmistettiin SU-8:sta ja sisäänrakennetusta platinaelektrodista.
SU-8:n tarkoitus oli toimia mikrofluidistisen kanavan kattona, seininä ja lattiana.
ED:2004-11-04
INSSI record number: 26449
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