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Author:Miranto, Akseli
Title:Microelectromechanical infrated spectrometer
Mikroelektromekaaninen infrapunaspektrometri
Publication type:Master's thesis
Publication year:2009
Pages:66 s. + liitt. 3      Language:   eng
Department/School:Signaalinkäsittelyn ja akustiikan laitos
Main subject:Mittaustekniikka   (S-108)
Supervisor:Ikonen, Erkki
Instructor:Holmlund, Christer
OEVS:
Electronic archive copy is available via Aalto Thesis Database.
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Location:P1 Ark S80     | Archive
Keywords:MEMS
Fabry-Perot interferometer
thermopile
spectrometer
Fabry-Perot interferometri
termopatsas
spektrometri
Abstract (eng): PURPOSE: To characterize the operation of a low-cost infrared spectrometer based on a MEMS Fabry-Perot interferometer and a thermopile detector.

MATERIALS AND METHODS: The transmission spectra of tunable microelectromechanical (MEMS) Fabry-Perot interferometers were simulated and measured.
Electrical control of the components was characterized.
The performance of thermopile detectors was characterized and compared to commercially available components.
Electronics for controlling the interferometer and the detector components were developed.
A laboratory demonstrator spectrometer based on the components was constructed.
Spectra of sample liquids were measured with the demonstrator and a commercial spectrometer.

RESULTS: The optical performance of the Fabry-Perot interferometer components corresponded well to the simulations.
Some of the components were electrically defective, but a solution for improving the processing of the components was found and tested.
The thermopile detectors were found to have performance on par with or even better than commercial thermopiles.
The constructed spectrometer performed as expected, having a lower spectral resolution than the laboratory spectrometer, but being able to distinguish the sample liquids.

CONCLUSION: A low-cost infrared spectrometer based on MEMS components is feasible.
The performance of the components was mainly in line with the simulations.
Abstract (fin): TYÖN TARKOITUS: Tässä työssä karakterisoitiin mikromekaaniseen Fabry-Perot interferometriin ja termopatsas-detektoriin perustuvan infrapunaspektrometrin toimintaa.

MATERIAALIT JA MENETELMÄT: Mikroelektromekaanisten (MEMS) Fabry-Perot interferometrien läpäisyspektrejä simuloitiin ja mitattiin toteutetuista komponenteista.
Termopatsas-detektorien toimintaa mitattiin ja suorituskykyä verrattiin kaupallisiin termopatsas-detektoreihin.
Karakterisoituihin komponentteihin perustuen rakennettiin spektrometridemonstraattori, jolla mitattiin nestenäytteiden läpäisyspektrejä.
Samojen näytteiden läpäisyspektrit mitattiin myös kaupallisella spektrometrillä ja mittausten tuloksia verrattiin keskenään.

TULOKSET: Mikromekaanisten Fabry-Perot komponenttien optinen suorituskyky vastasi hyvin simulaatioita.
Osa komponenteista toimi sähköisesti huonosti.
Komponenttien prosessointia muutettiin toiminnan korjaamiseksi ja muutosten toimivuus todettiin mittaamalla.
Termopatsas-detektorit toimivat vähintään yhtä hyvin ja joiltakin osin jopa paremmin kuin kaupalliset verrokit.
Rakennettu spektrometri toimi odotusten mukaisesti.
Sen resoluutio oli heikompi kuin kaupallisen vertailulaitteen, mutta se kykeni erottamaan mitatut näytteet toisistaan.

YHTEENVETO: Mikromekaaninen spektrometri, joka perustuu nyt karakterisoituihin komponentteihin, on toteutettavissa.
Komponenttien toiminta oli enimmäkseen simuloidun kaltaista.
ED:2009-12-14
INSSI record number: 38681
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