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| Author: | Karilahti, Mika |
| Title: | Software Module for Laser Lithography |
| Programmodul för en laser-baserad maskexponerande maskin | |
| Laseriin perustuvan maskinvalotuslaitteen ohjelmamoduli | |
| Publication type: | Master's thesis |
| Publication year: | 1993 |
| Pages: | 95 Language: eng |
| Department/School: | Sähkötekniikan osasto |
| Main subject: | Fysiikka (Tfy-3) |
| Supervisor: | Tuomi, Turkka |
| Instructor: | Laiholuoto, Kari |
| Digitized copy: | https://aaltodoc.aalto.fi/handle/123456789/81847 |
| OEVS: | Digitized archive copy is available in Aaltodoc
|
| Location: | P1 Ark S80 | Archive |
| Keywords: | interpreter computer graphics mask / reticle laser litography tulkki tietokone grafiikka maski laser litografia told dator grafik mask laser litografi |
| ED: | 1994-04-29 |
INSSI record number: 8664
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